High Purity Methyltrichlorosilane (MTS)
Description
The container is made of 316L stainless steel, There are three size available in capacity:45L, 250L, and 900L, which can hold 45kg, 250kg, and 1000kg respectively. There are two types of specifications for the 1/2" and 1/4" VCR interface valve. We also provide different packaging and interfaces according to the specific requirements of customers, Including ISO-TANK.
technical indicators
Ingredients/Impurity Names |
Product Specifications |
purity |
≥99.99% (based on metal impurities) |
trimethylsilyl chloride |
<100ppm |
Silicon tetrachloride |
<100ppm |
Total metal impurities |
<10 ppm |