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High Purity Methyltrichlorosilane (MTS)

High Purity Methyltrichlorosilane (MTS)


The container is made of 316L stainless steel, There are three size available in capacity:45L, 250L, and 900L, which can hold 45kg, 250kg, and 1000kg respectively. There are two types of specifications for the 1/2" and 1/4" VCR interface valve. We also provide different packaging and interfaces according to the specific requirements of customers, Including ISO-TANK.

technical indicators

Ingredients/Impurity Names

Product Specifications


≥99.99% (based on metal impurities)

trimethylsilyl chloride


Silicon tetrachloride


Total metal impurities

<10 ppm

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