IOTA CORPORATION LTD.
High-purity Dichlorosilane（DCS）
Product Description:
The packaging for dichlorodihydroxysilane is made of 316L stainless steel. There are two size available,10L and 47L, which can hold 10KG and 40KG of product respectively. The valve of CGA678/CGA636 is available. Different packaging and interfaces can also be provided according to the specific requirements of the user.
Technical Data Sheet
|
Gas Name |
Dichlorosilane(SiH2Cl2) |
|
Ingredient or Impurity Names |
Product specifications |
|
Purity |
≥99.9% |
|
Resistivity |
≥400 ohm.cm |
|
Other chlorosilanes |
≤1000 ppm/w |
|
Carbon（C） |
≤0.03 ppm/w |
|
Donor（As，P） |
≤0.08 ppb/w |
|
Boron（B） |
≤0.01 ppb/w |
|
Iron(Fe) |
＜2 ppb/w |
|
Nickel（Ni） |
≤0.2 ppb/w |
|
Chromium（Cr） |
≤2 ppb/w |
