Methylsilane(MS)
The container is made of carbon steel cylider with its inner wall mirror polished and passivated. There are two specifications available in capacity: 10L and 47L. And there are 3 kinds of valves available: CGA660/CGA350/CGA634. Different volume containers are packaged with a filling coefficient of 0.25 kg/L. Customized packaging and interfaces can also be provided.
Technical data
|
Material grade methylsilane |
|
|
Gas name |
Methylsilane(CH3SiH3) |
|
Ingredients/Impurity Names |
Product Specifications |
|
Methylsilane |
≥99.5 % |
|
Non condensable gas impurities (N2，O2+Ar，CO2，CH4) |
≤0.2% |
|
Silane |
≤0.2% |
|
Chlorosilane |
≤0.1% |
|
Electrical grade methylsilane |
|
|
Gas name |
Methylsilane(CH3SiH3) |
|
Ingredients/Impurity Names |
Product Specifications |
|
SiH3CH3 |
>99.98%(Excluding other methylsilanes) |
|
N2 |
≤10ppm/v |
|
Ar+O2 |
≤2ppm/v |
|
CO2 |
≤10ppm/v |
|
CH4 |
≤50ppm/v |
|
SiH4 |
≤50ppm/v |
|
Other Methylsilanes |
≤50ppm/v |
|
Chlorosilanes |
≤50ppm/v |
