Trimethylsilane(3MS)
The container is made of carbon steel cylider with its inner wall mirror polished and passivated. There are two specifications available in capacity: 10L and 47L, which can hold 3KG and 15KG product respectively. And there are 3 kinds of valves available: CGA660/CGA350/CGA634. Different packaging and interfaces can also be provided according to customer needs.
Technical data
|
Material grade trimethylsilane |
|
|
Ingredients/Impurity Names |
Product Specifications |
|
Trimethylsilane |
≥99.5 % |
|
Non-condensable gas impurities(N2, O2+Ar，CO2, CH4) |
≤1.0 % |
|
Silane |
≤0.5 % |
|
Chlorosilane |
≤0.5 % |
|
Electrical grade trimethylsilane |
|
|
Ingredients/Impurity Names |
Product Specifications |
|
( CH3)3SiH |
≥99.99% (excluding other methyl silanes) |
|
N2 |
≤10 ppm/v |
|
O2+Ar |
≤2ppm/v |
|
CO2 |
≤5ppm/v |
|
CH4 |
≤5ppm/v |
|
SiH4 |
≤5ppm/v |
|
Other Methylsilanes |
≤300 ppm/v |
|
Chlorosilanes |
≤10 ppm/v |
