In nearly 50 years of use, as the raw materials of silicon epitaxy growth, polycrystalline silicon, silicon oxide, silicon nitride, solar cells, optical fibers, non-ferrous glass manufacturing, chemical vapor deposition and other pan-semiconductor industries have a very wide range of applications. The only special gas that I have to face every day for more than ten years is silane. I have been engaged in the analysis of foreign capital sub-loading stations and the use of silane in solar power plants, red and blue light plants and IC plants. Through observation, I find that the safety risks and related protection knowledge that are easily ignored in the use of silane can be divided into three categories and share with you the relevant experience.

I. Safety Risks and Protection Ideas Existing in Design
Silane is a kind of spontaneous gas with a wide range of combustion, but when it is released into the air, it does not necessarily burn immediately, sometimes it may not burn at all. Understanding this, we can improve the safety of the design and operation of the system, as well as the reflection procedure in the event of an accident. According to a large number of academic studies on silane (FM Global, Intel, Hazards Research, etc.), the combustion of silane has a considerable relationship with its release mode and changes in the surrounding environment. Water mist can reduce smoke and dust, but be careful not to extinguish any flame caused by silane. Fire extinguishing can only be done by cutting off the source of silane leakage. If the silane flame is extinguished before the silane leak source is cut off, the silane will gather and cause an explosion. The flammability limit of silane is very wide, and diluted silane will expand the flammability range, rather than reduce the combustion range. The lower limit of flammability limit of silane is 2%. When different diluents are introduced, the flammability range is much lower than this concentration. The ambient air temperature and humidity also affect the flammability limit. Many companies use gas cabinets to supply silane. A large amount of oxygen influx is likely to cause an explosion when the gas cabinet opens. The explosion of Tainan Solar Power Plant in 2005 happened at the moment when the gas cabinet opens.