Silane is a general term for a series of silicon and hydrogen compounds whose chemical formula is SinH2n+2. In this series of hydrosilanes, methane is customarily called silane. Silane (silicon tetrahydride) is a colorless, toxic and very active compressed gas at room temperature and pressure. Fire at room temperature and explosive combustion occurs in air or halogen gas. Silane is a strong reductant, which reacts intensely with heavy metal halides, explosively with chlorine and bromine, and intensely with carbon tetrachloride. Silane is mainly used in semiconductor industry to produce high purity polycrystalline silicon, low temperature silicon dioxide CVD, silicon nitride CVD, polycrystalline silicon isolation layer, polycrystalline silicon ohmic contact layer and heterogenous or homogeneous silicon epitaxy growth raw materials, as well as ion implantation source and laser medium. It can also be used to produce solar cells, photoconductive fibers and photoelectric sensors. With the development of electronic industry, silane has been more and more widely used. In the microelectronics and Optoelectronics industry, silane can be used to produce high purity polycrystalline silicon, monocrystalline silicon, microcrystalline silicon, amorphous silicon, silicon nitride, silicon oxide, silicon carbide, heterostructure silicon, various metal silicides, etc. Because of its high purity and fine control, it has become an important special gas which can not be replaced by many other silicon sources.